MEMS Lithography
homecmos, DIY CMOS and MEMS fabrication
My Little Guide to Soft Lithography (or Soft Lithography for Dummies)
DIY fabrication of microstructures by projection photolithography

MEMS Electroplating
Fabrication of 3-D Micromesh Ni Structures Using Electroplating

DMD
MEMS and MOEMS By P. Rai-Choudhury, includes TI DMD details
Chapter 1: Introduction to MEMS (cont.) , MEMS apps
A New 3D, Direct-Write, Sub-Micron Microfabrication Process that Achieves True Optical, Mechatronic and Packaging Integration on Glass-Ceramic Substrates

Templates
Templating Three-Dimensional Self-Assembled Structures in Bilayer Block Copolymer Films

Arrayification & Scaling
Design of an on-chip microscale nanoassembly system

Nanotech - Molecular Assembly
nanowerk
Molecular Assembler website
Meta Modern, Dr. Eric K. Drexler's blog
Kinematic Self-Replicating Machines, Robert A. Freitas Jr. and Ralph C. Merkle
The Opensource Handbook of Nanoscience and Nanotechnology
Nanosystems: Molecular Machinery, Manufacturing, and Computation
The Guide To A Perfect Nanotechnology Library
Precision Nanometrology: Sensors and Measuring Systems for Nanomanufacturing
A to Z Nano.com Nanotechnology Videos
YouTube - NanoClips's Channel
Nanotechnology origami to build electronic devices
Self-Assembly of Lithographically Patterned 3D Micro/Nanostructures
Nanotechnology soldering to a single atomic layer
Sputtering Machine for Thin-Film Deposition
Quantum Nanostructures and Nanofabrication Group, includes SPD configurations
Patterning Strategies in Nanofabrication
OpenWetWare
Hackteria
nanorex, NanoEngineer-1, NanoHive-1, NanoHive@Home
Labrigger
Graphene and Other Two-Dimensional Materials